3M™ Betapure™ AUL Series Filter Cartridge AUL20Z13FC007, 20 in, 0.7UM ABS, 222, EPR, 15 Per Case
Original price was: $2,951.38.$2,125.00Current price is: $2,125.00.
3M™ Betapure™ AUL Series Filter Cartridge AUL20Z13FC007, 20 in, .7 um ABS, 222, EPR, 15/Case
Description
Stock Number: 7100057150 Product Type: Make To Order
Benefits
- Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
- Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
- The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration
Description
3M™ Betapure™ AUL Series Filter Cartridge AUL20Z13FC007, 20 in, .7 um ABS, 222, EPR, 15/Case
Extended Description
3M™ Betapure™ AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.






